Control device and control method for ion plating arc spots

The invention relates to a control device and control method for ion plating arc spots. The control device comprises a target, an electromagnetic field module and a permanent magnetic field module, wherein the electromagnetic field module and the permanent magnetic field module are arranged on the front side and the rear side of the target respectively, and the polarity of the electromagnetic field module and the polarity of the permanent magnetic field module are opposite to each other; the electromagnetic field module comprises electromagnetic coils and a control module; and the electromagnetic coils change the intensity and the direction of an electromagnetic field according to different control parameters input by the control module. According to the control method for the arc spots, the scanning voltage range, the scanning waveform and the scanning frequency input to the electromagnetic coils are set by adopting a programmable logic controller so that the arc spots can do diameter-increasing or diameter-