Abnormality Measuring Method And Abnormality Measuring Apparatus

An abnormality measuring method and an abnormality measuring apparatus of equipment are provided. The abnormality measuring method includes the following steps: acquiring a feature sequence corresponding to a life cycle according to recipe information and sensing information, wherein the feature sequence includes a plurality of feature subset sequences, and the life cycle is relative to a plurality of process runs; performing repeatedly a life segment analyzing process to acquire a plurality of life segments of the life cycle and each of the plurality of the feature subset sequences corresponding to one of the plurality of life segments; building a corresponding trending distribution of each of the plurality of life segments according to a corresponding feature subset sequence of the life segment; and determining whether to send an alarm message according to a plurality of trending distributions. 本发明提供了种设备的异常评估方法，包括下列步骤。根据配方信息与传感信号，取得对应于生命周期的特征序列，特征序列包括多个特征子集序列，生命周期关联于多个工艺操作。对生命周期重复执行生命区段分析程序，以取得生命周期中的多个生命区段，