Mask plate loading system and exposure machine

The embodiment of the invention provides a mask plate loading system and an exposure machine, relates to the technical field of display devices, and is capable of reducing the time of replacing a mask plate and improving the efficiency of replacing the mask plate. The mask plate loading system compr...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: LIU HONGXING, LI GUOMING, ZHANG LIANKUN, KANG CHENGMING
Format: Patent
Sprache:chi ; eng
Schlagworte:
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Beschreibung
Zusammenfassung:The embodiment of the invention provides a mask plate loading system and an exposure machine, relates to the technical field of display devices, and is capable of reducing the time of replacing a mask plate and improving the efficiency of replacing the mask plate. The mask plate loading system comprises a working region and at least one spare region, wherein the working region is provided with a first supporting platform; the spare region is provided with a second supporting platform; the first supporting platform and the second supporting platform are used for storing a mask plate; the mask plate loading system further comprises a conveying unit; the conveying unit is used for driving the first supporting platform and the second supporting platform to move simultaneously, so as to move the first supporting platform out of the working region and move the second supporting platform into the working region; a first loading unit is arranged above the working region; the first loading unit is used for loading the