MEMS BASED SOLENOID VALVE

An electronically switchable MEMS valve includes a housing formed from soft magnetic material and defining a fluid flow path therethrough. A magnetic field generating member is mounted within the housing and connected to a source of electrical power. A MEMS valve portion is mounted within the magnetic field generating member, has a valve closing member movably mounted therein, and defines a portion of the fluid flow path therethrough. The valve closing element is movable between a closed position wherein the fluid flow path is blocked, and an open position wherein the fluid flow path is not blocked. When an electric current is removed from the magnetic field generating member, the valve closing element is configured to move to and remain in the one of the closed position and the open position to which the valve closing element is the closest when the electric current is removed. 可电子切换MEMS阀包括由软磁材料形成并且限定穿过其的流体流动路径的壳体。磁场产生构件安装在壳体内并且连接到电源。MEMS阀部分安装在磁场产生构件以内，具有可移动地安装在其中的阀关闭构件并且限定穿过其的流体流动路径的部分。阀关闭元件在流体流动路径被阻塞的关闭位置和