Thin film thermal conductivity measuring system based on micro-nano fluorescent particles
The invention provides a thin film thermal conductivity measuring system based on micro-nano fluorescent particles. The measuring system at least comprises a sample structure module, an imaging light path module and a laser emission and spectrum measurement module. The sample structure module at lea...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The invention provides a thin film thermal conductivity measuring system based on micro-nano fluorescent particles. The measuring system at least comprises a sample structure module, an imaging light path module and a laser emission and spectrum measurement module. The sample structure module at least comprises a substrate, a to-be-measured thin film, an absorption heat source and the micro-nano fluorescent particles; the to-be-measured thin film is arranged on the substrate, and the absorption heat source and the micro-nano fluorescent particles are placed on the surface of the to-be-measured thin film; or the micro-nano fluorescent particles are directly placed on the substrate; the laser emission and spectrum measurement module is arranged above the sample structure module and used for irradiating the to-be-measured thin film so that the absorption heat source can absorb laser energy to generate heat, meanwhile, the micro-nano fluorescent particles are excited by lasers to generate fluorescence, and the sp |
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