Device and method for measuring two-dimension micro displacement using F-P standard tool

The invention discloses a device and a method for measuring the two-dimension micro displacement using F-P standard tool, comprising a light source, a flexible fiber and a surface array imaging device. The light source is connected with the flexible fiber. The front of the flexible fiber output end is provided with the surface array imaging device. between the flexible fiber and the surface array device, a quasi-light combining component is arranged. Through the quasi-light combining component, the light beams emitted from the flexible fiber are processed as a series of concentric circles of coaxially identical centers of a circle and are formed on the surface array imaging device. The quasi-light combining component comprises a filter sheet, an F-P standard tool and an object mirror. 本发明公开了种用F-P标准具测量二维微位移的装置与方法。包括光源、柔性光纤和面阵成像器件，光源与柔性光纤连接，柔性光纤输出端前方布置面阵成像器件，柔性光纤和面阵成像器件之间设置有准光组合部件，通过准光组合部件将柔性光纤出射的光束处理成共轴同圆心的系列同心圆并成像到面阵成像器件上，准光组合部件包括滤光片、F-P标准具和物镜；计算每个圆环分别沿坐标轴方向的圆心坐标，确定每个圆环的圆心坐标，由面阵成像器件移动前后的圆心坐标相减获得二维微位移值。本发明测量装置