Metal micro-droplet jetting additive manufacturing system and method for micro-nano device processing

The invention discloses a metal micro-droplet jetting additive manufacturing system and method for micro-nano device processing. The system is composed of a generating area, a screening area, a steering area and a processing area, and the four areas are all vacuum. The generating area is used for ge...

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Bibliographische Detailangaben
Hauptverfasser: LI HUI, SHEN SHENGNAN, XUE QIANKUN, HE FENGLIANG
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The invention discloses a metal micro-droplet jetting additive manufacturing system and method for micro-nano device processing. The system is composed of a generating area, a screening area, a steering area and a processing area, and the four areas are all vacuum. The generating area is used for generating electric metal liquid drops and enabling the liquid drops to obtain an initial velocity; the screening area is used for generating a uniform electric field and a uniform magnetic field; the steering area is used for generating a uniform electric field and a uniform magnetic field; and the processing area is used for achieving print processing of a complex micro-nano structure, and additional frameworks such as a support are not needed. According to the metal micro-droplet jetting additive manufacturing system and method for micro-nano device processing, through combination of the electric fields and the magnetic fields, accurate control over the electric metal liquid drops can be achieved; through electrom