Desmear module of a horizontal process line and a method for separation and removal of desmear particles from such a desmear module

The present invention is related to a desmear module (1) for a horizontal galvanic or wet-chemical process line for metal, in particular copper, deposition on a substrate to be treated for a removal of precipitates comprising a desmear container (2) being connectable to a desmear unit (3), a pump (4...

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Bibliographische Detailangaben
Hauptverfasser: GRUSSNER STEFAN, SKUPIN ANDREAS
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The present invention is related to a desmear module (1) for a horizontal galvanic or wet-chemical process line for metal, in particular copper, deposition on a substrate to be treated for a removal of precipitates comprising a desmear container (2) being connectable to a desmear unit (3), a pump (4) and at least a first liquid connection element (5) for connecting said pump with the desmear unit, wherein said pump is in conjunction with said desmear unit by said at least first liquid connection element; and wherein a treatment liquid level (6) is provided inside of the desmear module, which is above of an intake area (7) of the pump; wherein the desmear module further comprises at least a first liquid area (9), at least an adjacent second liquid area (10) comprising the intake area of the pump, and at least a first separating element (11) arranged between said at least first liquid area and said at least second liquid area. The present invention is further related to a method for selective separation and sub