Apparatus and method especially for degassing of substrates

A heater or cooler vacuum chamber, especially for degassing comprises an enclosure (3) and within the enclosure (3) a controllably heatable or coolable pocket (1a, 1b). Within the pocket, there is a workpiece holder and a gas feedline discharging the pocket. The inner surface of the pocket surrounds the workpiece in a closely spaced manner. The two halfs (1a, 1b) forming the pocket, may be controllably separate so as to allow a gas flow connection which establishes a negligible gas flow restriction to the remainder of the enclosure (3). 种尤其是用于除气的加热器或冷却器真空腔室，其包括围罩（3）以及在围罩（3）内的能够可控地加热或能够可控地冷却的容器（1a、1b）。在容器内，存在有工件保持和使容器进行排放的气体供给线。容器的内表面以紧密间隔的方式围绕工件。形成容器的两半部分（1a、1b）可以是可控地分离的，从而允许如下的气流连接，所述气流连接建立到围罩（3）的其余部分的可忽略的气流限制。