Application of ebip to inspection, test, debug and surface modifications

An electron-beam induced plasma is utilized to establish a non-mechanical, electrical contact to a device of interest. This plasma source may be referred to as atmospheric plasma source and may be configured to provide a plasma column of very fine diameter and controllable characteristics. The plasma column traverses the atmospheric space between the plasma source into the atmosphere and the device of interest and acts as an electrical path to the device of interest in such a way that a characteristic electrical signal can be collected from the device. Additionally, by controlling the gases flowing into the plasma column the probe may be used for surface modification, etching and deposition. 利用电子束诱导等离子体来与所关注装置建立非机械电接触。此种等离子体源可被称为大气等离子体源且可用以提供具有极细直径及可控特性的等离子体柱。所述等离子体柱横穿通入大气中的等离子体源与所关注装置之间的大气空间，且用作通向所关注装置的电路径，以便可从装置收集特性电信号。另外，通过控制流动至所述等离子体柱中的气体，可使用所述探测体来进行表面改质、蚀刻及沉积。