System, devices and methods for measuring differential and absolute pressure utilizing two MEMS sense elements

Featured are systems and methods for measuring differential and absolute pressure of a flowing fluid/gas in a fluid system. In such a method the fluid system is configured with first and second pressure taps that are spaced from each so the second pressure tap is downstream of the first pressure tap...

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Bibliographische Detailangaben
Hauptverfasser: BENDER VICTOR, ZUMMO PETER
Format: Patent
Sprache:chi ; eng
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Zusammenfassung:Featured are systems and methods for measuring differential and absolute pressure of a flowing fluid/gas in a fluid system. In such a method the fluid system is configured with first and second pressure taps that are spaced from each so the second pressure tap is downstream of the first pressure tap in a direction of flow. An absolute pressure sense element and a differential pressure sense element are provided, where the absolute pressure sense element is first fluidly coupled to one of the first or second pressure tap to measure an absolute pressure representative of the flowing fluid/gas. The differential pressure sense element is second fluidly coupled to each of the first and second pressure taps so as to measure a differential pressure of the flowing fluid/gas between the first and second pressure taps. 特征是用于测量流体系统中的流动的流体/气体的差压和绝对压力的系统和方法。在所述方法中,流体系统被配置有第和第二压力嘴,第和第二压力嘴彼此间隔开使得第二压力嘴沿流方向位于第压力嘴的下游。提供了绝对压力感测元件和差压感测元件,绝对压力感测元件第流耦合至所述第或第二压力嘴之测量表示流动的流体/气体的绝对压力。差压感测元件第二流耦合至第和第二压力嘴中的每个以测量第压力嘴与第二压力嘴之间的流动的流体/气体的差压。