MEMS SENSOR DEVICE HAVING INTEGRATED MULTIPLE STIMULUS SENSING
A sensor device comprises a device structure and a cap coupled with the device structure to produce a cavity in which components of the sensor device are located. The device structure includes a substrate and a movable element spaced apart from a surface of the substrate. A port extends through the...
Gespeichert in:
| Hauptverfasser: | , , , , |
|---|---|
| Format: | Patent |
| Sprache: | chi ; eng |
| Schlagworte: | |
| Online-Zugang: | Volltext bestellen |
| Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
| container_end_page | |
|---|---|
| container_issue | |
| container_start_page | |
| container_title | |
| container_volume | |
| creator | MARK E. SCHLARMANN CHAD S. DAWSON SALIAN ARVIND S ARVIND S. SALIAN ANDREW C. MCNEIL |
| description | A sensor device comprises a device structure and a cap coupled with the device structure to produce a cavity in which components of the sensor device are located. The device structure includes a substrate and a movable element spaced apart from a surface of the substrate. A port extends through the substrate underlying the movable element. A sense element is spaced apart from the movable element and is displaced away from the port. The movable element and the sense element form an inertial sensor to sense a motion stimulus as movement of the movable element relative to the sense element. An additional sense element together with a diaphragm spans across the port. The movable element and the additional sense element form a pressure sensor for sensing a pressure stimulus from an external environment as movement of the additional sense element together with the diaphragm relative to the movable element.
本公开涉及具有集成多个刺激感测能力的MEMS传感器装置。传感器装置包括：装置结构；和顶盖，所述顶盖与所述装置结构耦合，以产生空腔，所述传感器装置的组件位于所述空腔内。所述装置结构包括衬底和与所述衬底的表面间隔开的可移动元 |
| format | Patent |
| fullrecord | <record><control><sourceid>epo_EVB</sourceid><recordid>TN_cdi_epo_espacenet_CN107032289A</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>CN107032289A</sourcerecordid><originalsourceid>FETCH-epo_espacenet_CN107032289A3</originalsourceid><addsrcrecordid>eNrjZLDzdfUNVgh29Qv2D1JwcQ3zdHZV8HAM8_RzV_D0C3F1D3IMcXVR8A31CfEM8HFVCA7xBLJDITqAingYWNMSc4pTeaE0N4Oim2uIs4duakF-fGpxQWJyal5qSbyzn6GBuYGxkZGFpaMxMWoAeJEqbg</addsrcrecordid><sourcetype>Open Access Repository</sourcetype><iscdi>true</iscdi><recordtype>patent</recordtype></control><display><type>patent</type><title>MEMS SENSOR DEVICE HAVING INTEGRATED MULTIPLE STIMULUS SENSING</title><source>esp@cenet</source><creator>MARK E. SCHLARMANN ; CHAD S. DAWSON ; SALIAN ARVIND S ; ARVIND S. SALIAN ; ANDREW C. MCNEIL</creator><creatorcontrib>MARK E. SCHLARMANN ; CHAD S. DAWSON ; SALIAN ARVIND S ; ARVIND S. SALIAN ; ANDREW C. MCNEIL</creatorcontrib><description>A sensor device comprises a device structure and a cap coupled with the device structure to produce a cavity in which components of the sensor device are located. The device structure includes a substrate and a movable element spaced apart from a surface of the substrate. A port extends through the substrate underlying the movable element. A sense element is spaced apart from the movable element and is displaced away from the port. The movable element and the sense element form an inertial sensor to sense a motion stimulus as movement of the movable element relative to the sense element. An additional sense element together with a diaphragm spans across the port. The movable element and the additional sense element form a pressure sensor for sensing a pressure stimulus from an external environment as movement of the additional sense element together with the diaphragm relative to the movable element.
本公开涉及具有集成多个刺激感测能力的MEMS传感器装置。传感器装置包括：装置结构；和顶盖，所述顶盖与所述装置结构耦合，以产生空腔，所述传感器装置的组件位于所述空腔内。所述装置结构包括衬底和与所述衬底的表面间隔开的可移动元</description><language>chi ; eng</language><subject>GYROSCOPIC INSTRUMENTS ; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT ; MEASURING ; MEASURING DISTANCES, LEVELS OR BEARINGS ; MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE ; MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION,OR SHOCK ; MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES ; MICROSTRUCTURAL TECHNOLOGY ; NAVIGATION ; PERFORMING OPERATIONS ; PHOTOGRAMMETRY OR VIDEOGRAMMETRY ; PHYSICS ; PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS ; SURVEYING ; TESTING ; TRANSPORTING</subject><creationdate>2017</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20170811&DB=EPODOC&CC=CN&NR=107032289A$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,780,885,25563,76418</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20170811&DB=EPODOC&CC=CN&NR=107032289A$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>MARK E. SCHLARMANN</creatorcontrib><creatorcontrib>CHAD S. DAWSON</creatorcontrib><creatorcontrib>SALIAN ARVIND S</creatorcontrib><creatorcontrib>ARVIND S. SALIAN</creatorcontrib><creatorcontrib>ANDREW C. MCNEIL</creatorcontrib><title>MEMS SENSOR DEVICE HAVING INTEGRATED MULTIPLE STIMULUS SENSING</title><description>A sensor device comprises a device structure and a cap coupled with the device structure to produce a cavity in which components of the sensor device are located. The device structure includes a substrate and a movable element spaced apart from a surface of the substrate. A port extends through the substrate underlying the movable element. A sense element is spaced apart from the movable element and is displaced away from the port. The movable element and the sense element form an inertial sensor to sense a motion stimulus as movement of the movable element relative to the sense element. An additional sense element together with a diaphragm spans across the port. The movable element and the additional sense element form a pressure sensor for sensing a pressure stimulus from an external environment as movement of the additional sense element together with the diaphragm relative to the movable element.
本公开涉及具有集成多个刺激感测能力的MEMS传感器装置。传感器装置包括：装置结构；和顶盖，所述顶盖与所述装置结构耦合，以产生空腔，所述传感器装置的组件位于所述空腔内。所述装置结构包括衬底和与所述衬底的表面间隔开的可移动元</description><subject>GYROSCOPIC INSTRUMENTS</subject><subject>INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT</subject><subject>MEASURING</subject><subject>MEASURING DISTANCES, LEVELS OR BEARINGS</subject><subject>MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE</subject><subject>MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION,OR SHOCK</subject><subject>MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES</subject><subject>MICROSTRUCTURAL TECHNOLOGY</subject><subject>NAVIGATION</subject><subject>PERFORMING OPERATIONS</subject><subject>PHOTOGRAMMETRY OR VIDEOGRAMMETRY</subject><subject>PHYSICS</subject><subject>PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS</subject><subject>SURVEYING</subject><subject>TESTING</subject><subject>TRANSPORTING</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2017</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZLDzdfUNVgh29Qv2D1JwcQ3zdHZV8HAM8_RzV_D0C3F1D3IMcXVR8A31CfEM8HFVCA7xBLJDITqAingYWNMSc4pTeaE0N4Oim2uIs4duakF-fGpxQWJyal5qSbyzn6GBuYGxkZGFpaMxMWoAeJEqbg</recordid><startdate>20170811</startdate><enddate>20170811</enddate><creator>MARK E. SCHLARMANN</creator><creator>CHAD S. DAWSON</creator><creator>SALIAN ARVIND S</creator><creator>ARVIND S. SALIAN</creator><creator>ANDREW C. MCNEIL</creator><scope>EVB</scope></search><sort><creationdate>20170811</creationdate><title>MEMS SENSOR DEVICE HAVING INTEGRATED MULTIPLE STIMULUS SENSING</title><author>MARK E. SCHLARMANN ; CHAD S. DAWSON ; SALIAN ARVIND S ; ARVIND S. SALIAN ; ANDREW C. MCNEIL</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_CN107032289A3</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>chi ; eng</language><creationdate>2017</creationdate><topic>GYROSCOPIC INSTRUMENTS</topic><topic>INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT</topic><topic>MEASURING</topic><topic>MEASURING DISTANCES, LEVELS OR BEARINGS</topic><topic>MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE</topic><topic>MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION,OR SHOCK</topic><topic>MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES</topic><topic>MICROSTRUCTURAL TECHNOLOGY</topic><topic>NAVIGATION</topic><topic>PERFORMING OPERATIONS</topic><topic>PHOTOGRAMMETRY OR VIDEOGRAMMETRY</topic><topic>PHYSICS</topic><topic>PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS</topic><topic>SURVEYING</topic><topic>TESTING</topic><topic>TRANSPORTING</topic><toplevel>online_resources</toplevel><creatorcontrib>MARK E. SCHLARMANN</creatorcontrib><creatorcontrib>CHAD S. DAWSON</creatorcontrib><creatorcontrib>SALIAN ARVIND S</creatorcontrib><creatorcontrib>ARVIND S. SALIAN</creatorcontrib><creatorcontrib>ANDREW C. MCNEIL</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>MARK E. SCHLARMANN</au><au>CHAD S. DAWSON</au><au>SALIAN ARVIND S</au><au>ARVIND S. SALIAN</au><au>ANDREW C. MCNEIL</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>MEMS SENSOR DEVICE HAVING INTEGRATED MULTIPLE STIMULUS SENSING</title><date>2017-08-11</date><risdate>2017</risdate><abstract>A sensor device comprises a device structure and a cap coupled with the device structure to produce a cavity in which components of the sensor device are located. The device structure includes a substrate and a movable element spaced apart from a surface of the substrate. A port extends through the substrate underlying the movable element. A sense element is spaced apart from the movable element and is displaced away from the port. The movable element and the sense element form an inertial sensor to sense a motion stimulus as movement of the movable element relative to the sense element. An additional sense element together with a diaphragm spans across the port. The movable element and the additional sense element form a pressure sensor for sensing a pressure stimulus from an external environment as movement of the additional sense element together with the diaphragm relative to the movable element.
本公开涉及具有集成多个刺激感测能力的MEMS传感器装置。传感器装置包括：装置结构；和顶盖，所述顶盖与所述装置结构耦合，以产生空腔，所述传感器装置的组件位于所述空腔内。所述装置结构包括衬底和与所述衬底的表面间隔开的可移动元</abstract><oa>free_for_read</oa></addata></record> |
| fulltext | fulltext_linktorsrc |
| identifier | |
| ispartof | |
| issn | |
| language | chi ; eng |
| recordid | cdi_epo_espacenet_CN107032289A |
| source | esp@cenet |
| subjects | GYROSCOPIC INSTRUMENTS INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT MEASURING MEASURING DISTANCES, LEVELS OR BEARINGS MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION,OR SHOCK MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES MICROSTRUCTURAL TECHNOLOGY NAVIGATION PERFORMING OPERATIONS PHOTOGRAMMETRY OR VIDEOGRAMMETRY PHYSICS PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS SURVEYING TESTING TRANSPORTING |
| title | MEMS SENSOR DEVICE HAVING INTEGRATED MULTIPLE STIMULUS SENSING |
| url | https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-01-08T10%3A45%3A59IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-epo_EVB&rft_val_fmt=info:ofi/fmt:kev:mtx:patent&rft.genre=patent&rft.au=MARK%20E.%20SCHLARMANN&rft.date=2017-08-11&rft_id=info:doi/&rft_dat=%3Cepo_EVB%3ECN107032289A%3C/epo_EVB%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rfr_iscdi=true |