MEMS SENSOR DEVICE HAVING INTEGRATED MULTIPLE STIMULUS SENSING

A sensor device comprises a device structure and a cap coupled with the device structure to produce a cavity in which components of the sensor device are located. The device structure includes a substrate and a movable element spaced apart from a surface of the substrate. A port extends through the substrate underlying the movable element. A sense element is spaced apart from the movable element and is displaced away from the port. The movable element and the sense element form an inertial sensor to sense a motion stimulus as movement of the movable element relative to the sense element. An additional sense element together with a diaphragm spans across the port. The movable element and the additional sense element form a pressure sensor for sensing a pressure stimulus from an external environment as movement of the additional sense element together with the diaphragm relative to the movable element. 本公开涉及具有集成多个刺激感测能力的MEMS传感器装置。传感器装置包括：装置结构；和顶盖，所述顶盖与所述装置结构耦合，以产生空腔，所述传感器装置的组件位于所述空腔内。所述装置结构包括衬底和与所述衬底的表面间隔开的可移动元