Isotope gas purifying treatment device
The invention discloses an isotope gas purifying treatment device. The isotope gas purifying treatment device comprises a gas source, coarse adsorption equipment, a combined type gas online analyzer, fine adsorption equipment and a gas product buffer container which are sequentially communicated thr...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The invention discloses an isotope gas purifying treatment device. The isotope gas purifying treatment device comprises a gas source, coarse adsorption equipment, a combined type gas online analyzer, fine adsorption equipment and a gas product buffer container which are sequentially communicated through pipelines, wherein the coarse adsorption equipment comprises a plurality of groups of coarse adsorption assemblies which are connected in parallel, and each group of coarse adsorption assembly consists of a flowmeter and a coarse adsorption column which are connected in series; the fine adsorption equipment comprises a plurality of groups of fine adsorption columns which are connected in parallel; each coarse adsorption column consists of a coarse adsorption column cavity and a coarse adsorption agent in the corresponding coarse adsorption column cavity; each fine adsorption column consists of a fine adsorption column cavity and a fine adsorption agent in the corresponding fine adsorption column cavity. The is |
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