Core-shell cladding structure composite particle, preparation method and uses thereof

The invention belongs to the field of preparation of ultrafine composite powder materials, and relates to a core-shell cladding structure composite particle using mesoporous silicon oxide microspheres as an inner core and using cerium oxide nanoparticles as a shell layer, a preparation method of the...

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Bibliographische Detailangaben
Hauptverfasser: CHEN YANG, ZUO CHANGZHI, LI ZEFENG, CHEN AILIAN
Format: Patent
Sprache:chi ; eng
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Zusammenfassung:The invention belongs to the field of preparation of ultrafine composite powder materials, and relates to a core-shell cladding structure composite particle using mesoporous silicon oxide microspheres as an inner core and using cerium oxide nanoparticles as a shell layer, a preparation method of the core-shell cladding structure composite particle, and uses of the core-shell cladding structure composite particle in chemical mechanical polishing. According to the present invention, the core-shell cladding structure composite particle is synthesized in a liquid phase system by using mesoporous silicon oxide microspheres having radial mesopore channels as an inner core, using cerium (III) nitrate hexahydrate as a cerium source, and using hexamethylene tetramine, ammonia water or sodium hydroxide as a precipitant; and by optimizing the ratio of the mesoporous silicon oxide inner core having the radial mesopore channels to the cerium (III) nitrate hexahydrate, the concentration ratio of the precipitant to the ceri