Silicon wafer overturning and flushing device

The invention discloses a silicon wafer overturning and flushing device which comprises a flushing box, an air spraying box and an air heater. A flushing box door is arranged on the flushing box. An electric case is arranged on one side of the flushing box. A control panel is installed on the outer...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: LI CHANGHONG, ZHAO XUNFENG, YUAN XIBING
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The invention discloses a silicon wafer overturning and flushing device which comprises a flushing box, an air spraying box and an air heater. A flushing box door is arranged on the flushing box. An electric case is arranged on one side of the flushing box. A control panel is installed on the outer side of the electric case. A water outlet is formed in the bottom of the flushing box. One side of a water spraying pipe is connected with a water pump, and the other side of the water spraying pipe is embedded in the flushing box. Multiple nozzles are arranged on the pipe wall of the other side of the water spraying pipe. A first rotating shaft is further installed in the flushing box, and the first rotating shaft and a second rotating shaft are in transmission connection through a transmission belt. The air heater is installed on the top of the flushing box, and the air heater is connected with the air spraying box on the inner side of the top of the flushing box through a pipeline. The silicon wafer overturning