Vibration and non-linear inhibition method for piezoelectric positioning device

The present invention discloses a vibration and non-linear inhibition method for a piezoelectric positioning device. The method comprises the following steps of (1) pre-processing a voltage signal input into the piezoelectric ceramics of the piezoelectric positioning device; (2) subjecting the piezoelectric positioning device to kinetic modeling and obtaining an open-loop transfer function among the key parameters of the piezoelectric positioning device, the input voltage and the output displacement; (3) conducting the closed-loop control of the piezoelectric positioning device based on the integral feedback method; (4) adopting a measurement value of a force sensor between the piezoelectric ceramics and a flexible hinge as a feedback quantity for realizing the feedback control of the piezoelectric positioning device, measuring the output displacement of the flexible hinge by a displacement sensor, and realizing the vibration and non-linear inhibition of the piezoelectric positioning device. According to the