OPTICAL INSPECTION SYSTEM AND OPTICAL INSPECTION METHOD THEREOF

According to embodiments of the disclosure, an optical inspection system and an optical inspection method thereof are provided. The optical inspection system may include a lens group, a light source and a lens controlling module. The light source is configured to illuminate an object. The lens group...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: WU CHI-LIN, ANGOT LUDOVIC, LUO ANUN
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:According to embodiments of the disclosure, an optical inspection system and an optical inspection method thereof are provided. The optical inspection system may include a lens group, a light source and a lens controlling module. The light source is configured to illuminate an object. The lens group is configured to project the light from the light source as a collimated rectangular shaped light. The lens controlling module is configured to switch the lens group for changing an irradiance of the collimated rectangular shaped light and adjusting an illuminated area of the collimated rectangular shaped light on an object surface of the object. 种光学检测系统及其检测方法。该光学检测系统包括光源、透镜群及透镜控制模组。光源用于发射光线照射物体。透镜群用于投射光源的光线成为准直矩形光。透镜控制模组用于切换透镜群,以改变准直矩形光的幅照度且调整准直矩形光在物体表面上的照射面积。在实施例中,该光学检测系统可改善过热及低效率问题。