Sample preparation machine of single-crystal sample wafer

The invention discloses a sample preparation machine of a single-crystal sample wafer. The sample preparation machine comprises an object carrying platform, a grinding driving mechanism and a hoisting mechanism, wherein three groups of clamping claws and pressing sheets, which are used for fixing a...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: BIAN YONGZHI, SHENG FANGYU, XU JIPING, CHENG FENGLING, NING YONGDUO, LU JINJUN
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The invention discloses a sample preparation machine of a single-crystal sample wafer. The sample preparation machine comprises an object carrying platform, a grinding driving mechanism and a hoisting mechanism, wherein three groups of clamping claws and pressing sheets, which are used for fixing a sample wafer, are arranged at the edge of the object carrying platform; the grinding driving mechanism is arranged above the object carrying platform; the grinding driving mechanism is provided with five grinding heads; relative to the sample wafer mounted on the object carrying platform, one grinding head is arranged at the central position of the sample wafer and the other four grinding heads are uniformly distributed at the edge position of the sample wafer; and upper and lower positions of the grinding heads are adjusted through the hoisting mechanism. By adopting the sample preparation machine of the single-crystal sample wafer, disclosed by the invention, multi-point simultaneous grinding treatment on the sin