Closed runner reaction tank system with flow guide plate

The invention relates to a closed runner reaction tank system with a flow guide plate. The closed runner reaction tank system comprises a reaction tank main body, an upper sealing cover, a lower sealing cover and at least one flow guide plate, wherein a plurality of closed runners are arranged in the reaction tank main body; the upper sealing cover and the lower sealing cover are respectively arranged at the two ends of the reaction tank main body; an inlet end and an outlet end are respectively formed on the upper sealing cover and the lower sealing cover so as to connect the closed runners; the flow guide plate is arranged between the upper sealing cover and the reaction tank main body and is used for uniformly guiding the precursor injected from the inlet end of the upper sealing cover into the closed runners. 本发明涉及种具导流板的封闭式流道反应槽系统，包括：反应槽主体、上封盖、下封盖以及至少导流板。该反应槽主体内设有多个封闭式流道。该上封盖及下封盖分别设于该反应槽主体的二端，且该上封盖及下封盖分别具有进口端及出口端，以连通该多个封闭式流道。该导流板设于该上封盖与该反应槽主体之间，用以将从该上封盖的进口端所注入的前驱物均匀地导入该多个封闭式流道内。