Conveyor

The invention discloses a conveyor, and belongs to the technical field of semiconductor processing. The conveyor comprises a rotating part and at least one group of conveying wheels installed on the rotating part, and each group of conveying wheels comprises a plurality of rolling wheels distributed circumferentially by taking the rotating axis of the rotating part as a center, and the rotating axis of the rolling wheels in each group of the conveying wheels and the rotating axis of the rotating part are in different planes; since the rolling wheels are arranged around the rotating part circumferentially by taking the rotating axis of the rotating part as the center line, the rolling wheels are revolved around the center line of the rotating part during conveying, and glass substrates can be conveyed along conveyor lines. Since the rotating axis of the rolling wheels and the center line of the rotating part are in different planes, when the glass substrates are pushed to move in the direction vertical to the