High-order surface grating surface-emitting semiconductor laser
The invention discloses a high-order surface grating surface-emitting semiconductor laser. The laser comprises a surface metal electrode layer, a ridge waveguide layer, a p-type doped cladding layer, a grating layer, a p-type doped optical confinement layer, a quantum well or quantum dot active area...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The invention discloses a high-order surface grating surface-emitting semiconductor laser. The laser comprises a surface metal electrode layer, a ridge waveguide layer, a p-type doped cladding layer, a grating layer, a p-type doped optical confinement layer, a quantum well or quantum dot active area, an n-type doped optical confinement layer and a substrate layer, which are sequentially arranged, wherein a first-order grating is distributed on the grating layer; a high-order surface grating for coupling optical energy resonating along the horizontal direction to the perpendicular direction for output is distributed above the first-order grating in the center of a resonant cavity. The length of the high-order surface grating positioned above the grating layer in the center of the resonant cavity of the laser is (9 to 100) microns. A traveling wave mode in the resonant cavity of the laser is coupled into a radiation mode to realize surface output of laser by the high-order surface grating. The surface output li |
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