Microoperation device based on feeler pin and piezoelectric assisting and control method

The invention discloses a microoperation device based on a feeler pin and piezoelectric assisting and a control method, and relates to a micro-nano scale object transfer operation device and a control method so as to overcome a local high-stress defect generated by a traditional microoperation devic...

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Bibliographische Detailangaben
Hauptverfasser: LIU GUOHUA, ZHUO JINYAO, DENG ZHAOZHAO, LI JINXIN, SUN BAOJIA, LI TAO
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The invention discloses a microoperation device based on a feeler pin and piezoelectric assisting and a control method, and relates to a micro-nano scale object transfer operation device and a control method so as to overcome a local high-stress defect generated by a traditional microoperation device. The device comprises the nano operation tungsten feeler pin, a tungsten feeler pin holder and a base piezoelectric ceramic vibration platform. Under control of a precision stepping motor, the tungsten feeler pin holder achieves spatial three-dimensional motion of the feeler pin. The piezoelectric ceramic vibration platform is controlled by a drive power source. Specific micro fluid media are selected according to different micro objects, micro object pickup is achieved by means of the characteristics of flexibility and rigid stress absence of fluids, the stress relations of the micro objects are changed by adjusting the poses of the feeler pin and a base during releasing, accordingly a base piezoelectric ceramic