Thin film transistor and manufacturing method therefor

A thin film transistor is provided. The thin film transistor comprises: a substrate; an active pattern comprising a nitride, the active pattern being arranged on the substrate; a protection pattern comprising a non-nitride, the protection pattern being arranged on the active pattern; a gate electrod...

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Bibliographische Detailangaben
Hauptverfasser: JEONG HYUN-JUN, OK KYUNGUL, PARK JIN-SEONG
Format: Patent
Sprache:chi ; eng
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Zusammenfassung:A thin film transistor is provided. The thin film transistor comprises: a substrate; an active pattern comprising a nitride, the active pattern being arranged on the substrate; a protection pattern comprising a non-nitride, the protection pattern being arranged on the active pattern; a gate electrode superposed on the active pattern; and a gate insulating film between the gate electrode and the active pattern. 本发明提供薄膜晶体管。上述薄膜晶体管包括:基板;活性图案,配置于上述基板上,包括氮化物;保护图案,配置于上述活性图案上,包括非氮化物;栅电极,与上述活性电极重叠;以及栅极绝缘膜,形成于上述栅电极及上述活性图案之间。