Enhanced enclosures for acoustical gas concentration sensing and flow control

The invention relates to enhanced enclosures for acoustical gas concentration sensing and flow control. According to the invention, a mass-transfer rate control arrangement and method are also mentioned, in which a process precursor mixture is produced containing carrier gas and a process precursor gas. A quantity of the process precursor present in the process precursor mixture is acoustically sensed to produce a sensor output. A dilution gas is provided and the process precursor mixture and the dilution gas are separately conveyed to a dilution point, at which a diluted mixture of the dilution gas and the process precursor mixture is achieved. A relative flow rate of the carrier gas and the dilution gas is automatically controlled in response to the sensor output such that the diluted mixture at the dilution point has a prescribed mass transfer rate of the precursor gas. 种质量传递率控制布置以及方法，其中产生含有载气与处理前驱物气体的处理前驱物混和物。声学地感测所述处理前驱物混和物中存在的处理前驱物的量，以产生传感器输出。提供稀释气体，且所述处理前驱物混和物以及所述稀释气体单独地被输送到实现所述稀释气体与所述处理前驱物混合物的稀释混和物的稀释