Thin-film pressure sensor and manufacturing method thereof

The invention relates to the technical field of pressure sensors, in particular to a thin-film pressure sensor and a manufacturing method thereof. The thin-film pressure sensor comprises an elastic substrate, an insulating layer, a thin-film strain resistor, an electrode district, passivation layers...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: WANG SHUQING, CHEN YUEFENG, LEI GUIBIN, FU DONGYANG, PENG YINQIAO, GAN YUANJU
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The invention relates to the technical field of pressure sensors, in particular to a thin-film pressure sensor and a manufacturing method thereof. The thin-film pressure sensor comprises an elastic substrate, an insulating layer, a thin-film strain resistor, an electrode district, passivation layers and a golden thin film; the insulating layer is arranged on the elastic substrate, and the insulating layer is of a thick-film insulation medium slurry layer; both the thin-film strain resistor and the electrode district are arranged on the insulating layer; the passivation layer is arranged on each of the thin-film strain resistor and the insulating layer with the surface exposed; the golden thin film is arranged on the electrode district to form an electrode welding area. By the adoption of the thick-film insulation medium slurry layer which can be arranged on the elastic substrate which does not need to be ground and polished, the purpose that the elastic substrate is insulated with the thin-film strain resisto