Vacuum dust removal equipment for single crystal growth furnace

The invention discloses vacuum dust removal equipment for a single crystal growth furnace. The vacuum dust removal equipment is mounted between a vacuum pipeline and a vacuum pump of the single crystal furnace and can be used for effectively filtering volatile matters in a crystal pulling process, r...

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Bibliographische Detailangaben
Hauptverfasser: LI HENGSHENG, MA SHOULIN, LIN JUNHAI, ZHANG XIANWEN, ZHANG CHENGCHEN, ZHAO WEI, ZHAO XULUN
Format: Patent
Sprache:chi ; eng
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Zusammenfassung:The invention discloses vacuum dust removal equipment for a single crystal growth furnace. The vacuum dust removal equipment is mounted between a vacuum pipeline and a vacuum pump of the single crystal furnace and can be used for effectively filtering volatile matters in a crystal pulling process, realizing online ash cleaning, reducing pollution to vacuum oil and extremely prolonging the continuous working time of the vacuum pump so as to prolonging the continuous operation time of the single crystal furnace. According to the vacuum dust removal equipment for the single crystal growth furnace, disclosed by the invention, the filtering efficiency is more than or equal to 99.99 percent and a combustion-proof cooler is used for carrying out primary cooling on single crystal dust; the filtering efficiency of inflammable dust can reach 95 percent or more; the door is convenient to maintain and overhaul and the on-site maintenance cost can be reduced; the vacuum dust removal equipment can be used for effectively r