Method and apparatus for removing oxides from metal substrate

The invention relates to a method for removing oxides from a metal substrate, wherein the method comprises: providing a boron trifluoride stream, and heating the metal substrate. The invention further relates to a corresponding apparatus. 种用于从金属基材去除氧化物的方法,包括:提供三氟化硼流;及,加热所述金属基材。本发明也涉及相应的装置。...

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Bibliographische Detailangaben
Hauptverfasser: YANG, YOUHAO, ZHANG, LIMING, LIN, CHUAN, ZHU, HUI, WU, YINGNA, WHIMS, LAWRENCE J, ZHOU, HONG
Format: Patent
Sprache:chi ; eng
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Zusammenfassung:The invention relates to a method for removing oxides from a metal substrate, wherein the method comprises: providing a boron trifluoride stream, and heating the metal substrate. The invention further relates to a corresponding apparatus. 种用于从金属基材去除氧化物的方法,包括:提供三氟化硼流;及,加热所述金属基材。本发明也涉及相应的装置。