Target material assembly and manufacturing method thereof

The invention provides a target material assembly and a manufacturing method thereof. The manufacturing method of the target material assembly comprises the following steps: providing an indium tin oxide target material, a backboard and a welding flux, wherein the surface, used for welding, of the i...

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Bibliographische Detailangaben
Hauptverfasser:	PAN JIE, YAO LIJUN, AIHARA TOSHIO, WANG XUEZE, OIWA KAZUHIKO, DUAN GAOLIN
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	CLADDING OR PLATING BY SOLDERING OR WELDING CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR PERFORMING OPERATIONS SOLDERING OR UNSOLDERING TRANSPORTING WELDING WORKING BY LASER BEAM
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Beschreibung
Zusammenfassung:	The invention provides a target material assembly and a manufacturing method thereof. The manufacturing method of the target material assembly comprises the following steps: providing an indium tin oxide target material, a backboard and a welding flux, wherein the surface, used for welding, of the indium tin oxide target material is a first welding surface, and the surface, used for welding, of the backboard is a second welding surface; the welding flux is an indium welding flux; welding the first welding surface of the indium tin oxide target material and the second welding surface of the backboard through the indium welding flux to form the target material assembly, wherein the indium tin oxide target material and the backboard are welded through the indium welding flux; and the indium tin oxide target material can be infiltrated very well by the indium welding flux. Therefore, the welding strength of the target material assembly can be improved. In addition, the melting point of the indium welding flux is