Method for determining correlation between characteristics of optical thin films

The invention discloses a method for determining correlation between characteristics of optical thin films. The method is characterized in that by a correlation analysis technology in statistical mathematics and not limited to a specific thin-film processing experimental design, characteristic test...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	JI YIQIN, JIANG CHENGHUI, YANG XIAO, LIU DANDAN, LENG JIAN, LIU HUASONG, SUN PENG
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS TESTING
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