Method for determining correlation between characteristics of optical thin films

The invention discloses a method for determining correlation between characteristics of optical thin films. The method is characterized in that by a correlation analysis technology in statistical mathematics and not limited to a specific thin-film processing experimental design, characteristic test results of thin films prepared by two technologies are analyzed to obtain the correlation between two characteristics of the thin films. The method has universality for analysis of correlation between characteristics of optical thin films. 本发明公开了种光学薄膜特性之间相关性的确定方法，该发明的特点是通过使用统计数学的相关性分析技术，不限于特定的薄膜工艺实验设计，将同种工艺制备的薄膜特性测试结果进行分析，可得到薄膜两种特性之间的相关性。本方法对于光学薄膜特性之间相关性的分析具有普适性。