MEMS devices on flexible substrate

A flexible film including one or more MEMS elements and articles including the flexible film are described. The flexible film includes a polymer layer between two metal layers with one of the metal layers containing a perforation. The polymer layer includes voided regions that allow for relative mov...

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Bibliographische Detailangaben
Hauptverfasser:	BERGERON PHILLIP J, MOONEY JUSTINE A, GEISSINGER JOHN D, GUNDEL DOUGLAS B, PALANISWAMY RAVI, FOO SIANG SIN, LUNCEFORD BRENT D
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES MICROSTRUCTURAL TECHNOLOGY PERFORMING OPERATIONS PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS TRANSPORTING
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Beschreibung
Zusammenfassung:	A flexible film including one or more MEMS elements and articles including the flexible film are described. The flexible film includes a polymer layer between two metal layers with one of the metal layers containing a perforation. The polymer layer includes voided regions that allow for relative movement of the two metal layers. 本发明描述了种包括个或多个MEMS元件的柔性膜，以及包括所述柔性膜的制品。所述柔性膜包括在两个金属层之间的聚合物层，其中所述金属层中的者包括穿孔。所述聚合物层包括空隙区域，从而允许所述两个金属层发生相对运动。