Powder-particle-vibrating magnetron sputtering coating method
The invention discloses a powder-particle-vibrating magnetron sputtering coating method. A layer of metal or alloy film is formed on the surface of a vibrating powder particle through magnetron sputtering by using a physical vapor deposition (PVD) method. The powder-particle- vibrating magnetron spu...
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| creator | GAO XUEXU BAO XIAOQIAN CAO SHUAI LI JIHENG MA BIN LU KECHAO |
| description | The invention discloses a powder-particle-vibrating magnetron sputtering coating method. A layer of metal or alloy film is formed on the surface of a vibrating powder particle through magnetron sputtering by using a physical vapor deposition (PVD) method. The powder-particle- vibrating magnetron sputtering coating method comprises the main steps as follows: 1) connecting a feeding tank filled with power particles and a feeding hole of magnetron sputtering equipment in a sealing way, and mounting metal targets on target positions; 2) carrying out vacuumization to 4*10Pa; 3) introducing argon, and controlling the pressure of argon to be maintained at 0.1-0.5Pa; 4) setting the sputtering power of unit target area to be 5-10w/cm and carrying out sputtering cleaning on the targets for 10-15min; 5) setting the output power of a motor to enable the powder particles to vibrate in a vibrating trough according to a certain speed to pass through a sputtering region; and 6) after finishing sputtering coating, filling |
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A layer of metal or alloy film is formed on the surface of a vibrating powder particle through magnetron sputtering by using a physical vapor deposition (PVD) method. The powder-particle- vibrating magnetron sputtering coating method comprises the main steps as follows: 1) connecting a feeding tank filled with power particles and a feeding hole of magnetron sputtering equipment in a sealing way, and mounting metal targets on target positions; 2) carrying out vacuumization to 4*10<-3>Pa; 3) introducing argon, and controlling the pressure of argon to be maintained at 0.1-0.5Pa; 4) setting the sputtering power of unit target area to be 5-10w/cm and carrying out sputtering cleaning on the targets for 10-15min; 5) setting the output power of a motor to enable the powder particles to vibrate in a vibrating trough according to a certain speed to pass through a sputtering region; and 6) after finishing sputtering coating, filling</description><language>chi ; eng</language><subject>CHEMICAL SURFACE TREATMENT ; CHEMISTRY ; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL ; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL ; COATING MATERIAL WITH METALLIC MATERIAL ; COATING METALLIC MATERIAL ; DIFFUSION TREATMENT OF METALLIC MATERIAL ; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL ; METALLURGY ; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION</subject><creationdate>2017</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20170322&DB=EPODOC&CC=CN&NR=106521437A$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,776,881,25542,76289</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20170322&DB=EPODOC&CC=CN&NR=106521437A$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>GAO XUEXU</creatorcontrib><creatorcontrib>BAO XIAOQIAN</creatorcontrib><creatorcontrib>CAO SHUAI</creatorcontrib><creatorcontrib>LI JIHENG</creatorcontrib><creatorcontrib>MA BIN</creatorcontrib><creatorcontrib>LU KECHAO</creatorcontrib><title>Powder-particle-vibrating magnetron sputtering coating method</title><description>The invention discloses a powder-particle-vibrating magnetron sputtering coating method. 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| language | chi ; eng |
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| subjects | CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION |
| title | Powder-particle-vibrating magnetron sputtering coating method |
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