APPARATUS FOR CONVEYING WORKPIECE

The invention provides an apparatus for conveying a workpiece, wherein the apparatus can convey the fine workpiece to a next process device in high speed under a precondition of no noise increase. The apparatus (100) for conveying the workpiece comprises the components of a conveying path (20) which is provided with a rail-shaped worklpiece conveying surface (24), wherein the conveying path (20) can convey the workpiece (W) without limitation to the position of the workpiece (W) on the workpiece conveying surface (24); and a piezoelectric component (21) which is used for making the workpiece conveying surface (24) generate an approximately planar circulated traveling wave, wherein the traveling wave which is generated by the piezoelectric component (21) is used for conveying the workpiece (W) on the workpiece conveying surface (24). 本发明提供种能够在不增大噪音的前提下将微细化后的工件高速输送到下道工序装置的工件输送装置。本发明的零件送料器(100)包括：输送路径(20)，其具有轨道状的工件输送面(24)，该输送路径(20)能够输送工件(W)而不限制工件(W)在工件输送面(24)上的位置；以及压电元件(21)，其用于使工件输送面(24)产生呈大致平面状循环的行波，利用压电元件(21)所