Electrostatic chuck with embossed top plate and cooling channels

An electrostatic chuck for retaining a substrate is provided herein. In some embodiments, the electrostatic chuck for retaining the substrate may include a susceptor including an electrically conductive susceptor base having one or more cooling channels formed in an upper surface thereof; a raised c...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	OH JEONGHOON, BALAN ARUMUGA, MANGALORE CHETHAN
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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