Electrostatic chuck with embossed top plate and cooling channels

An electrostatic chuck for retaining a substrate is provided herein. In some embodiments, the electrostatic chuck for retaining the substrate may include a susceptor including an electrically conductive susceptor base having one or more cooling channels formed in an upper surface thereof; a raised central support disposed over the one or more cooling channels; and a dielectric top plate disposed on the raised central support, wherein the dielectric top plate has an embossed top surface, and the dielectric top plate and raised central support include a plurality of holes to facilitate delivery of a cooling gas from one or more cooling channels to a backside of the substrate when disposed on the embossed top surface of the dielectric top plate. 于此提供种用于保持基板的静电夹盘。在些实施方式中，用于保持基板的静电夹盘可包含：感受器，该感受器包含：导电性感受器基底，该导电性感受器基底具有形成于该导电性感受器基底的上表面中的个或更多个冷却通道；突起中央支撑件，该突起中央支撑件设置覆盖该个或更多个冷却通道；及介电顶板，该介电顶板设置于该突起中央支撑件上，其中该介电顶板具有凸起顶部表面，且其中该介电顶板及该突起中央支撑件包含多个孔洞，以便于在设置于该介电顶板的该凸起顶部表面上时，输送由该个或更多个冷却通道的冷却气体至该基板的背侧。