Material outgassing rate measuring device and method based on hot cathode gauges through static pressure rise method

The invention relates to a material outgassing rate measuring device and method based on hot cathode gauges through a static pressure rise method and belongs to the field of measurement. According to the device, a high-vacuum sample chamber, a first vacuum valve, a first small hole, a second small h...

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Bibliographische Detailangaben
Hauptverfasser: SHENG XUEMIN, CHEN LIAN, HUANG HONG, LI YANWU, CHENG YONGJUN, DONG MENG, GAO JIE, LI GANG
Format: Patent
Sprache:chi ; eng
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Zusammenfassung:The invention relates to a material outgassing rate measuring device and method based on hot cathode gauges through a static pressure rise method and belongs to the field of measurement. According to the device, a high-vacuum sample chamber, a first vacuum valve, a first small hole, a second small hole, a first molecular pump, a second molecular pump and a drying pump are sequentially connected in series through a vacuum pipeline; the hot cathode ionization gauge B or a mass spectrograph are connected to the part, between the first small hole and the second small hole, of the vacuum pipeline; a resistance vacuum gauge is connected to the part, between the second small hole and the first molecular pump, of the vacuum pipeline; the two ends of the second vacuum valve are connected with an outlet of the first vacuum valve and an inlet of the first molecular pump through vacuum pipelines respectively; the hot cathode ionization gauge A is connected to the part, between the first vacuum valve and the second vacuum