High-accuracy organic light-emitting device (OLED) component preparation device and method

The invention relates to a high-accuracy organic light-emitting device (OLED) component preparation device and method. The device comprises an evaporation source array, a substrate, a transmission device and a mask plate, and the mask plate is matched with the evaporation source array. A plurality o...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	YE YUN, YAN QUN, LYU SHANHONG, ZHANG YONG'AI, GUO TAILIANG, XU ZHONGWEI
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SEMICONDUCTOR DEVICES SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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