High-accuracy organic light-emitting device (OLED) component preparation device and method

The invention relates to a high-accuracy organic light-emitting device (OLED) component preparation device and method. The device comprises an evaporation source array, a substrate, a transmission device and a mask plate, and the mask plate is matched with the evaporation source array. A plurality o...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: YE YUN, YAN QUN, LYU SHANHONG, ZHANG YONG'AI, GUO TAILIANG, XU ZHONGWEI
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The invention relates to a high-accuracy organic light-emitting device (OLED) component preparation device and method. The device comprises an evaporation source array, a substrate, a transmission device and a mask plate, and the mask plate is matched with the evaporation source array. A plurality of evaporation sources are arrayed to form the evaporation source array. Materials in the evaporation sources are evaporated vertically upwards to the substrate. Evaporating-plating of the substrate is completed due to the fact that the substrate or the evaporation source array are driven by the transmission device to move, so that an OLED component is formed. According to the high-accuracy OLED component preparation device and method, the distance between the substrate and the mask plate is enlarged, and the influence exerted on evaporating-plating by the mask plate is reduced; the distances between the substrate and the evaporation sources are reduced, so that the evaporation materials are less diffused into the e