Film coating carrying table and film coating device

The invention discloses a film coating carrying table and a film coating device. The film coating carrying table comprises a base plate carrying table and a compensation piece. The compensation piece is arranged on the action route of the base plate carrying table. The base plate carrying table is s...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	CAO CHENGYU, ZHAN YIMIN
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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Beschreibung
Zusammenfassung:	The invention discloses a film coating carrying table and a film coating device. The film coating carrying table comprises a base plate carrying table and a compensation piece. The compensation piece is arranged on the action route of the base plate carrying table. The base plate carrying table is suitable for moving towards the compensation piece in a direction from the first position. The end, facing the first position in the above direction, of the compensation piece is provided with a shielding boundary, and the shielding boundary is suitable for moving in the above direction or suitable for shape changing. 本发明公开了种镀膜载台及镀膜装置，该镀膜载台包括基板载台以及补偿片。补偿片配置于基板载台的动作路径上，基板载台适于自第位置沿着方向往补偿片移动。补偿片沿着上述方向朝向第位置的端具有遮挡边界，遮当边界适于沿着上述方向移动或适于改变形状。