Method for reducing defect generation in SiC crystal growth

The invention relates to a method for reducing defect generation in SiC crystal growth. Further improvement is made on the basis of silicon carbide single crystal growth by common physical vapor transport technique, and the method includes: (1) preparing graphite glue; (2) applying the graphite glue...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: YANG KUN, ZHENG QINGCHAO
Format: Patent
Sprache:chi ; eng
Schlagworte:
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