Fragile material nano cutting method based on focused ion beam injection

The invention relates to a fragile material nano cutting method based on focused ion beam injection. The method comprises the following steps: placing a fragile material substrate to be processed in a focused ion beam sample chamber; observing morphology of the fragile material substrate to be processed by virtue of an electron beam imaging system, and selecting a processing area; performing controllable ion injection modified processing on a selected area of the substrate by utilizing the focused ion beam to obtain a modified sample; and placing an SEM on-site online nano cutting platform into the focused ion beam sample chamber, and carrying out controllable quantitative nano cutting on the modified substrate at different cutting depths by utilizing the SEM on-situ online nano cutting platform. By adopting the method, the abrasion of a cutter can be effectively reduced, and the processing quality of the surface of the processed fragile material is improved. 本发明涉及种基于聚焦离子束注入的脆性材料纳米切削方法，包括：将待加工脆性材料基底置于聚焦离子束样品室