Substrate transportation device

A substrate transportation device is provided. Even when the setting of a drying temperature is changed, height positions of vibrating plates and a transfer unit are not needed to be adjusted. The substrate transportation device has a plurality of vibrating plates which make the substrate ultrasonic float on a substrate transportation surface; and a heating part which is arranged at a back side of the substrate transportation device of the vibrating plates. The substrate transportation device is configured to have the transfer unit between adjacent vibrating plates. The transfer unit makes the substrate transferred to next vibrating plate and has a transportation air ejecting portion which ejects air to the substrate transportation surface side and forming a part of the substrate transportation surface; and support extension parts extendingly arranged in the direction of adjacent vibrating plates. Support air ejecting portions are arranged in the support extension parts and ejecting air towards the vibrating