Movable bearing plate apparatus used for assembly line
The invention discloses a movable bearing plate apparatus used for an assembly line. The movable bearing plate apparatus is used for bearing a to-be-processed substrate and can move on a conveying mechanism in the assembly line; the movable bearing plate apparatus comprises a metal bearing plate, an...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The invention discloses a movable bearing plate apparatus used for an assembly line. The movable bearing plate apparatus is used for bearing a to-be-processed substrate and can move on a conveying mechanism in the assembly line; the movable bearing plate apparatus comprises a metal bearing plate, an electrode plate and an insulating unit, wherein the metal bearing plate can be movably positioned on the conveying mechanism, and comprises a penetration hole; the electrode plate is arranged above the metal bearing plate and is used for bearing the to-be-processed substrate; the electrode plate is provided with a power supply loading region which faces to the penetration hole of the metal bearing plate and is exposed outside the penetration hole of the metal bearing plate; the insulating unit is arranged on the metal bearing plate and is clamped between the metal bearing plate and the electrode plate; the insulating unit is arranged around the periphery of the electrode plate and the periphery of the to-be-proces |
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