Adjustable, deformable mirror for compensating irregularities of beam
The invention relates to an adjustable, deformable mirror (1) for compensating irregularities of a beam. The mirror is provided with a mirror element for reflecting incident rays of the beam, a base body for securing the mirror element and at least one actuating element (4) for applying forces (F) t...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The invention relates to an adjustable, deformable mirror (1) for compensating irregularities of a beam. The mirror is provided with a mirror element for reflecting incident rays of the beam, a base body for securing the mirror element and at least one actuating element (4) for applying forces (F) to the mirror element, wherein the mirror element is a planar element (2) with a thickness (d) of at least 1 mm, and the actuating element (4) is a lever mechanism with a plurality of lever elements (5). The invention also relates to a method for compensating irregularities of a beam (12.1, 12.2) as well as an optical arrangement with the mirror (1) according to the invention.
本发明涉及种用于补偿射束的不规则性的可调整可变形反射镜(1),该反射镜带有用于反射该射束的入射线的反射镜元件、用于固定该反射镜元件的基体以及用于向该反射镜元件施加力(F)的至少个致动元件(4),其中该反射镜元件是带有至少1mm厚度(d)的平面元件(2)并且该致动元件(4)是带有多个杠杆元件(5)的杠杆机构。本发明还涉及种用于补偿射束(12.1,12.2)的不规则性的方法以及带有根据本发明的反射镜(1)的光学安排。 |
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