Ceramic carrier and sensor element, heating element and sensor module, each with a ceramic carrier and method for manufacturing a ceramic carrier

The present invention relates to a ceramic carrier, in particular an Al2O3 carrier, on which a thin-film structure (10) of platinum or a platinum alloy is arranged, wherein the carrier and/or the thin-film structure (10) are adapted in order to reduce mechanical stresses owing to different thermal e...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	DIETMANN STEFAN, LOOSE THOMAS, FLECKENSTEIN ALFRED, TEUSCH DIETER
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVEREDIN A SINGLE OTHER SUBCLASS ELECTRICITY MEASURING MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR MEASURING QUANTITY OF HEAT MEASURING TEMPERATURE MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUIDLEVEL METERING BY VOLUME PHYSICS TARIFF METERING APPARATUS TESTING THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
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