Heater unit and heat processing device

The invention provides a heater unit and a heat processing device. The heat processing device (10) comprises a heat processing furnace (1), a heat source (21), a light penetrating component (3) and a gas circulation mechanism (4). The heat processing furnace (1) accommodates a processing part. The h...

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Bibliographische Detailangaben
Hauptverfasser:	FUJITA OTO, KUN TOMOHIKO, NAKANISHI NORI, FUKUDA YOSHIHITO
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION ORPROCESSING OF GOODS ELECTRIC HEATING ELECTRIC LIGHTING NOT OTHERWISE PROVIDED FOR ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS SEMICONDUCTOR DEVICES TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINSTCLIMATE CHANGE
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Beschreibung
Zusammenfassung:	The invention provides a heater unit and a heat processing device. The heat processing device (10) comprises a heat processing furnace (1), a heat source (21), a light penetrating component (3) and a gas circulation mechanism (4). The heat processing furnace (1) accommodates a processing part. The heat source (21) radiates infrared ray. The light penetrating component (3) is configured in a manner of facing the heat source (21), thereby isolating the heat source (21) from an atmosphere. The light penetrating component (3) is made of a material which realizes penetration of at least one part of the infrared ray which is radiated from the heat source (21). The gas circulation mechanism (4) is formed for circulating cooling gas in a space (300) which is formed between the heat source (21) and the light penetrating component (3). 本发明提供加热器单元和热处理装置。热处理装置(10)包括热处理炉(1)、热源(21)、透光构件(3)和气体流通机构(4)。热处理炉(1)收容被处理件。热源(21)使用放射红外线的热源。透光构件(3)与热源(21)相对配置，把热源(21)与气氛隔离。透光构件(3)由使从热源(21)放射的红外线的至少部分透过的材料制成。气体流通机构(4)构成为使冷却气体在形成于热源(21)