Micro-position gap sensor assembly

The invention relates to a micro-position gap sensor assembly including a structural housing and a flexible diaphragm fixedly attached forming a barrier against fluid ingress. The structural housing includes a shaft orthogonally attached to the flexible diaphragm, a first retainer including one or more standoffs, a second retainer, and a parallel plate gap sensor. The parallel gap plate sensor includes a non-contact sensor plate biased against a portion of the first retainer defining a plane of the non-contact sensor plate and receiving a biasing force in opposition of the first retainer from the second retainer, a target plate comprised of a conductive paramagnetic material. The parallel plate gap sensor is configured such that displacement of one of the target plate or the non-contact sensor plate changes a distance between the target plate and the non-contact sensor plate. 本发明涉及种微定位间隙传感器组件，其包括结构壳体和固定连接并形成防止流体进入的屏障的挠性隔膜。所述结构壳体包括与述挠性隔膜垂直连接的轴、具有个或多个支柱的第保持件、第二保持件和平行板间隙传感器。所述平行板间隙传感器包括非接触感测板和目标板，所述非接触感测板偏压在第保持件