Organic metal compound-containing gas supply device

[Problem] To provide an organic metal compound supply device that can stably supply an organic metal compound-containing gas stably over a long period of time. [Solution] This supply device (1) of an organic metal compound-containing gas is provided with a container (10), a supply unit (13), and a high-specific gravity object. The container (10) comprises an inner space (10a), a carrier gas inlet (10b) and an exhaust port (10c). The inlet (10b) is connected to the bottom of the inner space (10a). The exhaust port (10c) is connected to the top of the inner space (10a). The supply unit (13) is positioned in the inner space (10a). A mixture of organic metal compound-containing particles and a filler material is arranged in the supply unit (13). The high-specific gravity object is arranged in the inner space (10a), above the supply unit (13). The high-specific gravity object has a specific gravity higher than that of the organic metal compound-containing particles. 本发明提供种能够长时间稳定地供给含有机金属化合物的气体的有机金属化合物的供给装置。含有机金属化合