Compatible spin-dry box core used for monocrystalline-silicon polished wafer cleaning machine

A compatible spin-dry box core used for a monocrystalline-silicon polished wafer cleaning machine belongs to the monocrystalline-silicon polished wafer production field. A box core with a unique structure is arranged in a 5 inch piece box. In the box core, through a special hexagon support, a 4 inch...

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Bibliographische Detailangaben
Hauptverfasser: WU YUEFENG, XIONG CHENGLEI, SHAO QI
Format: Patent
Sprache:chi ; eng
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Zusammenfassung:A compatible spin-dry box core used for a monocrystalline-silicon polished wafer cleaning machine belongs to the monocrystalline-silicon polished wafer production field. A box core with a unique structure is arranged in a 5 inch piece box. In the box core, through a special hexagon support, a 4 inch piece box is fixed so as to realize that a 4 inch silicon chip is installed in the 5 inch piece box. A compatible problem of silicon chips with three sizes of 4 inches, 5 inches and 6 inches in a same cleaning machine is solved. Cleaning cost is greatly saved. A specific position of the box core is provided with a bar-shaped through hole and a circular air hole so that smooth flow of an air flow during a drying process is guaranteed, an eddy current is not generated, a drying effect and cleanliness are guaranteed. Simultaneously, the specific position of the box core is provided with a cushion block made of a polyvinylidene fluoride material and the cushion block is contacted with the 5 inch piece box so that fric